Description
Accelerating voltage 100 V to 30 kV
Magnification: ×20 to ×800K (Polaroid Mode)
0.5 nm resolution at 30 kV and 2 nm resolution at 0.2 kV
7 Detectors including a secondary electron (SE) lower detector
SE/BSE upper detector and SE/BSE top detector with energy filtration
five quadrant BSE detector
STEM detector for bright/dark field imaging
SDD EDS Detector
EBSD camera
The maximum probe current is 30nA and this allows to perform quantitative x-ray microanalysis at low voltage and in the STEM mode