Description
General specifications:
• Cold Cathode field-emission with Auto-Flash (NEG pump)
• Accelerating voltage 10 V to 30 kV
• Beam current up to 40 nA
• Magnification: ×20 to ×1, 000,000 (Polaroid Mode)
• 5-axis stage motorization
• Stage range : X = 110 mm, Y = 110 mm, Z = 1.5 to 40 mm
• Eucentric tilt : -5 to + 70°
• Eucentric rotation : 360°
• Beam blanking
• Image pixel resolution from 640×480 to 5120×3840
• Specimen chamber vacuum < 1×10-4 Pa
• Specimen diameter < 150 mm (X, Y) and height < 25 mm
• Cold trap
• Infra-Red chamberscope
• Faraday cup for current measurements
• Image Spatial Resolution:
• 0.8 nm at 15 kV (SE, normal mode)
• 2.0 nm at 1 kV (SE, normal mode)
• nm at 1 kV (SE, deceleration mode)
• 0.8 nm at 30 kV (BF)
Electrons detectors for imaging:
• Lower E-T SE detector for standard topographic imaging
• Upper SE/BSE (TTL) detector for low angle BSE annular imaging with energy filtration up to 150 V (high pass filter)
• Top SE/BSE (TTL) detector with ExB filter for high angle BSE annular imaging with energy filtration up to 3 kV (high pass filter)
• STEM BF YAG detector with BF apertures (Ø 1, 1.5, 2 mm)
• STEM DF imaging with converting plate
• 5-quadrants solid-state BSE detector (PDBSE)
X-ray detectors:
• Bruker Nano 60 mm² SDD XFlash 6|60
• Bruker Nano annular SDD w/ four quadrants (1.2 st) Flat Quad
• Quantax software from Bruker
• X-ray mapping, linescans, multipoints automatic jobs
• Phase analysis
• Standard and standardless quantification (point, linescan, map) with PB/ZAF and PHIROZ models
• Beam drift correction